ULVAC真空泵：VDN301,VDN401,VDN601,VDN901,VDN602,VDN902,VSN1501,VSN2401,GLD-N051,GLD-N136,GLD-N201,GLD-N280,PVD-N180-1,PVD-N360-1.NB100A,NB300A,NB600A,NB1200A,NB100B,NB300B,NB600B,NB1200B,NRL60A,NRL90A,NRL180A等。

ULVAC機(jī)工的產(chǎn)品：膜片型干式真空泵DA-20D;DA-40S;DA-60D,DA-120S;DA-121D;DA-241S,DAL-5S;DAL-5D;DAL-10S;DAL-181D;DAL-361S;DA-15S;DA-15D;DA-30S;DA-30D;DA-60S;DAT-50D;DAT-100S;DAP-15;DAP-30;DAM-010;MD-4,MD-4C,MD-8,MD-8C等；膜片型干式真空泵（高真空型）DAU-100;DAU-100H等；膜片型干式特氟龍真空泵（耐腐蝕型）DTC-21/21K;DTC-41/41K；DTC-60;DTC-120型等；渦旋型干式真空泵DVS-321;DVS-631;DVT-300;DSR-150,DSR-300,DSR-500型等；油旋片式真空泵G-5;G-5DA;G-10DA;G-15;G-25SA;G-20DA;G-50SA;G-50DA;G-100S;G-100D;GHD-030;GHD-060;GHD-120;GVD-050A;GVD-101;GVD-136;GVD-166;GVD-201;GLS-051;GLD-051;GLD-101;GLD-136A;GLD-136C;GLD-166;GLD-201A;GLD-201B;GMD-135;GCD-051X;GCD-136X,GCD-201X等;其他DOP-9D;DOP-20D,DOP-40S,DOP-40D,DOP-80S;DOP-80SP;DTP-18;DTP-45D,DTP-90S,DTP-90D,DTP-180S,DTP-180SQ;DSB-050;DSP-151;DSB-251;DSB-451,DSB-601;MBS-010,MBS-030,MBS-050等。

日本ULVAC產(chǎn)品：D-240DK;D-240DK-100;D-330K;D-330DK;D-650K;D-650DK;D-950K;D-950DK;EC403;EC603;EC803;PKS-016;PKS-030;PKS-070;PMB-001C/CM;PMB-003C/CM;PRC-003A;PRC-006A;PRC-012A;PMB-024C/CM;PMB-040B;PMB-060B;F-250;U-250;PBL-02/04/06/10/14/20;ULK-04A/06A/10A/14A;PFL-22/22TM/36/52;等。